A novel protective cover for microcomponents

摘要

This paper presents a novel tool for assembly of micro particles in a SEM chamber. A new mechanismus, called Protective Cover for Microcomponents, which allows the positioning of the micro parts on the platform inside the chamber without gluing them on the platform is proposed. It is well known the vacuum pump, especially turbo pump, that makes a vacuum in the SEM chamber, has higher sensitivity to foreign object damage. That is the reason why the micro parts are glued on the disks in the platform of the SEM chamber. Otherwise, the grippers that have to pick, to lift and place the particle in a desired system (position, orientation) are very fragile and can not overcome the adhesive force of glue and separating the particle from the disk. Besides, for the automated assembly process it is very important that the particles stay on the exactly defined location and position. The showed system is standard and can be mounted without additional time, modification or expenses into the SEM chamber. It enables, on the one hand, easier manipulation of the micro parts, that need not to glue on the base and, on the other hand, opens the door for introduction more automation in the manipulation process in the SEM chamber by making a basis for modular assembly system. Therefore the future constructing of a modular holder which can correspond to different requirements of the assembly of numerous microsystems will also be reported. Need for standardisation in micro world becomes more and more articulate. With a higher level of standardisation, the degree of automation grows up, too. The uniformity of parts, operations and tools is a strong support to an automation assembly system.