Design considerations and validation of the MSTAR absolute metrology system

摘要

Absolute metrology measures the actual distance between two optical fiducials. A number of methods have been employed, including pulsed time-of-flight, intensity-modulated optical beam, and two-color interferometry. The rms accuracy is currently limited to ～5 microns. Resolving the integer number of wavelengths requires a 1-sigma range accuracy of ～0.1 microns. Closing this gap has a large pay-off: the range (length measurement) accuracy can be increased substantially using the unambiguous optical phase. The MSTAR sensor (Modulation Sideband Technology for Absolute Ranging) is a new system for measuring absolute distance, capable of resolving the integer cycle ambiguity of standard interferometers, and making it possible to measure distance with sub-nanometer accuracy. In this paper, we present recent experiments that use dispersed white light interferometry to independently validate the zero-point of the system. We also describe progress towards reducing the size of optics, and stabilizing the laser wavelength for operation over larger target ranges. MSTAR is a general-purpose tool for conveniently measuring length with much greater accuracy than was previously possible, and has a wide range of possible applications.