Micro-Raman study of defect structure and phonon spectrum of He-implanted LiNbO3 waveguides

摘要

Raman scattering and IR-reflection have been performed for in-depth investigation of He-implanted LiNbO3. The obtained results clearly demonstrate substantial changes, from the top surface up to the buried nuclear stopping layer acting as optical barrier, in terms of crystal structure, chemical bonding and electro-optical properties of the waveguide.