ADHESION OF DIELECTRIC MATERIALS TO METAL OXIDES, SILICON OXIDE AND SILICON NITRIDE

摘要

An analytical method to determine the amount of adhesion promoter is discovered. The amount of silane couplers such as AAPS and 3-APS on a rough or flat surface of metal oxides could be determined with the ratio of atomic concentrations and/or the ratio of two O_1s bands in XPS. Practical adhesion strength is determined by 90 °peel test for which a thin ( ～20 μm) layer of polyimide is employed as a peel-backing layer. The locus of failure usually determined with XPS is indicative of poor or good adhesion.