Inductive Coupled Plasma source with internal coil: Performance and Stability

摘要

An Inductively-Coupled Plasma excitation with internal antenna is characterized. The main Plasma is produced by an internal coil powered by a radiofrequency generator around 6 MHz. Experiments have been carried out for RF powers up to 200 watts and in the pressure range 1-100 mTorr. The stability of the source was investigated and the power transfer efficiency was measured in all the parameter space. Langmuir probes were used to measure the electron density and the electron energy distribution function in the discharge. Finally, magnetic confinement with permanent dipole magnets has also been studied.