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Charge separation in a magnetized three-dimensional plasma-sheath-lens

机译:在磁化的三维等离子体鞘透镜中的电荷分离

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Charge separation in a magnetized 3D plasma-sheath-lens is demonstrated by simulations and experiments. The presence of the magnetic field makes the charge kinetics within the potential structure of the sheath mass selective. This fact combined with previously demonstrated discrete and modal focusing effects provides a possibility to detect mass peaks from 1 up to a few hundreds units atomic mass using a magnetized plasma-sheath-lenses of a few cm in diameter. Experiments are performed in a device operated at pressures below 10 mTorr with three ECR plasma cells in gas mixtures of Ar/SF_6/O_2. An axial magnetic field adjustable from 0 up to 600 Gauss is created by two coils. Mass spectra are visualized measuring the etching profile resulted by the incidence of different ions species on the electrode creating the plasma-sheath-lens.
机译:通过模拟和实验证明了磁化3D等离子体鞘镜片中的电荷分离。磁场的存在使得电荷动力学在鞘质量选择性的潜在结构内。该事实与以前说明的离散和模态聚焦效果相结合,可以使用直径几厘米的磁化等离子体鞘透镜来检测从1到几百个单元原子质量的质量峰。实验在在10mTorr低于10mTorr的压力下在Ar / SF_6 / O_2的气体混合物中的3 eCR等离子体细胞操作的装置中进行。由0个线圈产生的轴向磁场可调节0至600高斯。质谱是通过在电极上产生等离子体鞘透镜的电极上的不同离子物种的发生率来测量蚀刻轮廓导致的蚀刻轮廓。

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