Influence of Evaporation Conditions on Physical Properties of MgO Thin-Film

摘要

In order to clarity the physical properties of MgO protecting layer for ac-PDPs prepared by vacuum evaporation, MgO thin films were studied by measuring ion induced secondary electron emission characteristics (γ_i), work function, and x-ray diffraction. Especially we tried to clarify how oxygen has an effect on the properties of the evaporated MgO thin film during the vacuum evaporation and characterize these materials.