Laser ellipsometry - precise method of surface measurement

摘要

Systematization of major fields of laser ellipsometry application is given and basic ways of its development are considered. A series of industrially oriented laser ellipsometers have been developed. These are a scanning high-spatial resolution microellipsometer and a high-time resolution in-situ ellipsometer. The partial accuracy chart of the laser ellipsometers and the issues of their metrological certification are described. The possibilities of laser ellipsometry are illustrated by experimental measurements performed on equipment designed.