A mechanism of excimer laser ablation of polymer materials (the effects of excimer laser irradiation on UV absorption coefficient of polyethylene

摘要

There are many unclear points in the mechanism of excimer laser ablation of the polymer materials. In this paper, for the mechanism elucidation of ablation phenomenon when excimer laser of two kinds of wavelengths of 1 93nm and 248nm was irradiated onto the high density polyethylene(HDPE), etch rate, UV absorption coefficient, UV transmittance property and IR spectroscopic property were measured. As a result, it could confirm that the irradiation of 193nm laser induces increase in the absorption coefficient of HDPE for the laser, which results in the memory effect of laser ablation phenomenon, but a thermal influence was more dominant than a non-thermal photo-chemical one to the mechanism of excimer laser ablation of HDPE.