We have developed a highly integrated liquid-crystal-on-silicon light valve for three-panel color projector. The silicon panel was designed and fabricated by a custom 0.5 μm, 3-metal CMOS technology with a spatial resolution of 1024 * 768 pixels. The pixel pitch was 13.8μm and the fill factor was 91%. 6-bit digital data drivers and gamma-correction circuitry were integrated within the silicon panel for true gray scale and full color representation. The displays panel was assembled with a mixed twisted nematic and birefringence liquid crystal cell for high contract ratio at CMOS compatible voltage. The measured contrast ratio was 100:1 at 3.5Vrms. The optical system utilized a trichroic prism assembly (TPA) for both color separation and recombination. Based on this TPA and three silicon light valves, a high-resolution projection display was demonstrated.
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