In this work, we report on both the surface patterning as well as the analysis of hydrogen-free tetrahedral amorphous carbon (ta-C) films. In particular we report on the patterning of thin (20-100 nm) and thick (2-3 μm) ta-C films and the tribological properties of the last ones. The direct laser interference patterning (DLIP) was used to create periodic micro and sub-micrometer gratings. This technology offers the opportunity for a fast and flexible fabrication of periodic patterns with a long-range order on macroscopic areas. The smallest structures we produced in ta-C had a full width at half maximum of ～ 90 nm.
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