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Development of large ultraprecision grinding system with ELID for aspheric optical elements and components

机译:具有ELID的大型超高磨削系统的开发,用于非球面光学元件和部件

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A large ultraprecision aspheric grinding system with ELID (Electrolytic In-Process Dressing) has been developed for the fabrication of large optical elements and components, which can be used in Synchrotron radiation facilities. The machine table measures is 1500mm in length and 550mm in width, and rectangular X-ray aspherical mirrors such as troidal and cylindrical mirrors can be fabricated using the developed machine system. The machine can use different grinding wheels with attachments. An ELID-grinding unit is equipped on the machine, and long term stabilized grinding performance was successfully achieved for SiC, Si, fused silica mirrors and many other hard material mirrors. 3-axes double V rollers are used for sliding the machine, and air hydrostatic bearing is used for the grinding wheel spindle. This paper introduces the major specifications of the developed machine, and discuss certain representative applications in the R&D of special optical elements and components such as X-ray reflective optics.
机译:已经开发了具有ELID(电解在工艺敷料)的大型超高的非球面磨削系统,用于制造大型光学元件和部件,可用于同步辐射设施。机床尺寸为1500毫米,宽度为550mm,并且可以使用开发的机器系统制造矩形X射线非球面镜等矩形和圆柱形镜子。机器可以使用不同的磨轮与附件。在机器上配备了Elid-磨床,对于SiC,Si,熔融石墨镜和许多其他硬质材料镜,​​成功实现了长期稳定的研磨性能。 3轴双V辊用于滑动机器,并且空气静压轴承用于砂轮主轴。本文介绍了开发机的主要规格,并讨论了特殊光学元件的研发和诸如X射线反射光学的部件的某些代表性应用。

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