The purpose of this investigation is to analyze the friction and wear properties of CVD-SiC films finished with ELID-grinding and ordinary grinding at dry condition. Normal load is changed from 0.049N to 98N. The following results are obtained. Friction coefficient of CVD-SiC film finished with two kinds of grinding methods show similar results. Specific wear rate of CVD-SiC film with ELID-grinding does not depend on the grinding direction. Wear mode are classified into two types, powder formation (ws≤10{sup}(-9) mm{sup}2/N) and without powder formation. (ws≤3×10{sup}(-10) mm{sup}2/N) CVD-SiC film with ELID-grinding showed high wear resistance because wear mode of powder formation did not occur when P{sub}(max) is less than P{sub}(max.c). Transition between powder formation and without powder formation is explained in terms of the dimensionless parameter (S{sub}C){sup}*.
展开▼
