ECO-polishing of hard materials by applying mechanochemical effects

摘要

Ecological polishing process that is desirable for keeping the earth and the working environment clean and safe would be more required in the next century. Mechanochemical polishing method which uses no chemical liquid will be suitablely applicable to this request. Machining features and superiority of dry polishing and pure-water based wet polishing of Si single crystal and sapphire are described.