首页> 外文会议>European Conference on Solid-State Transducers >Focused electron beam induced processing, a technology to develop and produce miniaturized electron-, IR, THz-, X-ray sources, high resolution detectors and sensors for IR-and X-ray tomography
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Focused electron beam induced processing, a technology to develop and produce miniaturized electron-, IR, THz-, X-ray sources, high resolution detectors and sensors for IR-and X-ray tomography

机译:聚焦电子束诱导处理,一种技术开发和生产小型化电子 - ,IR,THz,X射线源,高分辨率检测器和IR和X射线断层扫描的传感器

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摘要

FEBIP-focused electron beam induced processing-is a novel technology which renders outstanding advantages compared to other miniaturization techniques, like electron beam lithography, deep X-ray lithography, or 3D construction by optical polymerization. The principle, process characteristics, outstanding results and a variety of possible applications is described.
机译:聚焦电子束诱导的加工 - 是一种新颖的技术,与其他小型化技术相比,与电子束光刻,深X射线光刻或通过光学聚合的3D构建相比,使得优异的优点呈现出色的优点。描述了原理,过程特征,出色的结果和各种可能的应用。

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