Electrical conductive CVD diamond film was synthesized as a candidate for new electrical contact material. The distribution of the electrical resistance value [Ω] for all the diamond deposited samples is narrower than that of W plate, which was used as the substrate of the CVD diamond film. Moreover, some of the diamond-deposited samples had lower apparent electrical resistance than tungsten plate. Especially, the sample synthesized for 1 hour had small apparent electrical resistance, and the narrow distribution of the value. Therefore, we can think that diamond-deposited sample is a promising material for electrical contact.
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