The influence of subsurface damage's micro crack on the optical properties of the optical components

摘要

The subsurface damage (SSD) introduced by manufacturing procedures are the important factors affecting mechanical and optical properties of the high-precision optical components. In this paper, we investigated the relationships between the size of SSD's micro crack and optical properties by studying on the influence of grinding process parameters (average abrasive size, grinding force, wheel speed, grinding depth) on the optical properties (transmittance, absorbance, reflectance) of high-precision optical components first, and then determining the micro crack's size under the grinding process parameters. Results indicate that with the increase of average abrasive size, grinding force or grinding depth, the transmittance of high-precision optical components decreases while the absorbance and reflectance increase. However, as the wheel speed increases, the transmittance of high-precision optical components increases while the absorbance and the reflectance decrease. Combining these results with the influence of grinding process parameters on the size of micro crack, it can be found that with the increase of micro crack's size, the transmittance will decrease, while the absorbance and the reflectance will increase.