Performance improvement of model following control for a pneumatic stage

摘要

This paper deals with the positioning accuracy of a pneumatic stage. In the control of a pneumatic stage, parameter variation of pneumatic system due to air compressibility is one of the important issues. It reduces the performance of PDD2 control, which is the position control of a pneumatic stage, and leads to low positioning repeatability. To compensate for the parameter variation, this paper proposes to apply model following control (MFC) to a pneumatic stage. In our research, the effectiveness of MFC has been previously verified through experiments. However, the effectiveness is limited to low-speed positioning. Therefore, in this paper, to achieve the effectiveness in high-speed positioning, consideration of model and change of controller in MFC are carried out. As a result, the effectiveness of MFC in high-speed positioning is verified experimentally.