首页> 外文会议>Conference on metrology, inspection, and process control for microlithography XXVII >Phase extraction from random phase-shifted shadow moire fringe patterns using stereovision technique
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Phase extraction from random phase-shifted shadow moire fringe patterns using stereovision technique

机译:使用立体视觉技术从随机相移的阴影波纹条纹图案中提取相位

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The measurement accuracy of phase shifting shadow moire is limited by the spatially non-uniform and random phase shift error. Substantial work has been developed to overcome this difficulty. But few works are proposed to deal with the two error sources above simultaneously. In the presented paper, we describe a solution that can compensate the both error sources at the same time. In our proposed method, a binocular stereovision system is integrated into our test configuration. By measuring the coordinates of marks attached to the measurement grating, the stereovision system obtains the position and the setting parameters are calibrated. Then, the acquiring three fringe patterns are analyzed by iterative least squares method in temporal and the phase shift is calibrated by the least squares fitting in spatial. Because a local cost function is used, the proposed calibration technique is insensitive to spatial variations in detector response. Numerical simulations and optical experiments show that the proposed method can effectively minimize the two phase-shift error sources and possess a superior performance than the existing typical phase shifting algorithm.
机译:相移阴影波纹的测量精度受到空间不均匀和随机相移误差的限制。为了克服该困难,已经进行了大量的工作。但是很少有人提出同时处理上述两个错误源的工作。在本文中,我们描述了一种可以同时补偿两个误差源的解决方案。在我们提出的方法中,将双目立体视觉系统集成到我们的测试配置中。通过测量附着在测量光栅上的标记的坐标,stereovision系统获得位置并校准设置参数。然后,通过迭代最小二乘法在时间上分析获取的三个条纹图案,并通过在空间上拟合最小二乘来校准相移。由于使用了局部成本函数,因此提出的校准技术对检测器响应的空间变化不敏感。数值模拟和光学实验表明,所提出的方法可以有效地减小两个相移误差源,并具有优于现有典型相移算法的性能。

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