Growth of Complex Epitaxial Multi-Component Oxide Thin Films and Heterostructures with Strong Anisotropy

摘要

We briefly review our data on MOCVD growth problems of sandwich stacked heterostructures based on Bi-Sr-Ca-Cu-O and YBa_2Cu_3O_7 high temperature superconductors. Non-superconducting layers were (Ca, Sr)CuO_2, (Ca, Ba)CuO_2 and Bi_4Ti_3O_(12). Structures were with c-axis normal or inclined with about 45° vs. the surface of the substrate. Film-substrate lattice relationship, growth mechanism and the resulting morphology controlling roughness and uniformity, stability domain of the phases and inter diffusion are all important aspects toward significant progress in the field. Our analysis indicates that requirements are more severe for non-c-axis heterostructures, and suggest some ideas for further improvements.