Systematic error analysis and modeling of MEMS close-loop capacitive accelerometer

摘要

This paper proposes a systematic error model for two type of structures of MEMS close-loop capacitive accelerometers, targeted to be used in micro inertial measurement unit(MIMU). The proposed model for the accelerometer's systematic errors includes common physical parameters used to rate an accelerometer: bias, scale factor, cross-axis sensitivity and misalignment. Dynamic analysis based on the basic structure of accelerometer used to illustrate the reason and characteristics, including temperature effect, of these parameters are described. Acentric and temperature experiments show that the proposed model reduces systematic errors to nearly stochastic error level.