Ultra-Smoothness Grinding of Fine Ceramics with #140-Mesh Grain Size Diamond Wheel

摘要

The ductile-mode grinding of fine ceramics of the hot pressed silicon carbide (HPSC), the hot isostatic pressed silicon nitride (HIPSN) and the alumina-titanium carbide (Al_2O_3-TiC) with the coarse #140-mesh metal-bonded diamond wheel is found to be possible in the surface plunge grinding. The surface roughness in the ductile-mode plunge grinding, however, is rough over 200nm(Rmax) because of the formation of the grinding grooves. The newly devised ultra-smoothness grinding method in which the grinding grooves can be removed and diminished is effective for the formation of ultra-smoothness surface on the fine ceramics. When using the new method, the surface roughness of the ground hot pressed silicon carbide ceramic area of 50μm square measured with AFM is attainable about 3.8nm(Rmax) and 0.9lnm(RMS).