The vibration OD-Blade slicing with air-mist working fluid was investigated on the slicing characteristics. The following points have been noted: 1. Not only the slicing force is decreased by applied vibration, but also this decrease rate of slicing force is more effective when the large amplitude acts. 2. The vibration slicing can be continuously done over a long period with no dressing, even though an air-mist working fluid is supplied. 3. Wafer waviness for the slicing accuracy with an air-mist working fluid is worsen to be unable to facilitate the inflow of the working fluid and the removing of cutting debris in the non-vibration slicing case, however, the vibration slicing has brought the high accuracy regardless of the supply method of the working fluid.
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