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Measurement of large convex aspheres

机译:大型凸非球面的测量

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Abstract: Large convex aspheres are notoriously difficult to fabricate because of the tremendous cost and difficulty of making accurate measurements of the optical surfaces. The new 6.5- and 8-m-class telescopes require convex secondary mirrors that are larger, more aspheric, and more accurately figured than those for existing telescopes. Two powerful measurement techniques have been implemented at the Mirror Lab and demonstrated to be accurate and economical. The polished surfaces are interferometrically measured using holographic test plates. This measurement technique uses full-aperture test plates with computer-generated holograms (CGH) fabricated onto spherical reference surfaces. When supported a few millimeters from the secondary and properly illuminated with laser light, an interference pattern is formed that shows the secondary surface errors. The hologram consists of annular rings of metal drawn onto the curved test plate surface using a custom-built writing machine. This test has been implemented for secondaries up to 1.15-m diameter, with 4 nm rms surface measurement accuracy. In addition to this test, a swing arm profilometer was built to measure the rough surface during aspherization and loose abrasive grinding. The machine uses simple motions and high quality components to achieve 50 nm rms measurement accuracy over 1.8-m mirrors. !10
机译:摘要:众所周知,大型凸非球面透镜难以制造,原因是成本高昂且难以对光学表面进行精确测量。新的6.5和8 m级望远镜需要凸形的辅助镜,与现有望远镜相比,该辅助镜更大,更非球面并且可以更精确地得到轮廓。 Mirror Lab实施了两种强大的测量技术,并证明它们是准确且经济的。使用全息测试板以干涉法测量抛光的表面。此测量技术使用全口径测试板,并在球形参考表面上制作计算机生成的全息图(CGH)。当被支撑在距离次级表面几毫米的位置并用激光适当照射时,会形成干涉图样,从而显示出次级表面误差。全息图由使用定制的书写机在弯曲的测试板表面上绘制的金属环形环组成。该测试已针对直径最大为1.15 m的次级进行,具有4 nm rms的表面测量精度。除此测试外,还构建了摆臂轮廓仪,以测量非球面磨削和松散磨料磨削过程中的粗糙表面。该机器采用简单的动作和高品质的组件,可以在1.8米的反射镜上实现50 nm rms的测量精度。 !10

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