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Temperature coefficient of sensitivity dependence of the measurement error of quartz crystal resonators

机译:温度灵敏度系数对石英晶体谐振器测量误差的依赖性

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This paper expounds the measurement error of Quartz Crystal Resonators (QXRs) vs. the temperature coefficient of force sensitivity. Based on the analysis of the differences between the temperature coefficient of frequency and the temperature coefficient of force sensitivity, the measurement error formula is deduced. According to the error formula, the physical signification of the temperature coefficient of force sensitivity is explained, and the method of selecting scale temperature is given. The measurement error formula has been verified recently by experimental results. To expand the selectable range of cut modes and to compare the performances of QXRs, the selecting principle of the best group of the angles (angles of cut of quartz crystal plate, /spl theta/, /spl phi/, and azimuth angle of applied force, /spl phi/) is given simultaneously. According to the measurement error formula and the selecting principle of the best group of the angles, the best azimuth angle of AT-cut used as force sensitive resonators is found through the analysis of the measurement error. This paper provides a theoretical basis on which the measurement accuracy of QXR force sensors is improved.
机译:本文阐述了石英晶体谐振器(QXR)的测量误差与力敏感温度系数的关系。通过分析频率温度系数与力敏感温度系数之间的差异,推导了测量误差公式。根据误差公式,解释了力敏感温度系数的物理意义,并给出了标尺温度的选择方法。最近通过实验结果验证了测量误差公式。为了扩大切割模式的选择范围并比较QXR的性能,请选择最佳角度组(石英晶体板的切割角度,/ spl theta /,/ spl phi /和所应用的方位角)的选择原理。力,/ spl phi /)同时给出。根据测量误差公式和最佳角度组的选择原理,通过对测量误差的分析,找出了AT-cut作为力敏谐振器的最佳方位角。本文为提高QXR力传感器的测量精度提供了理论依据。

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