First order gratings for gain coupled GaInAsP DFB-lasers made by maskless focused ion beam patterning

摘要

First order gratings in GaInAsP laser structures were defined by maskless focused ion beam implantation. The optically pumped devices show laser operation at 77 and 300 K. All lasers operate in a single longitudinal mode which is typical for the gain coupled distributed feedback effect. The implanted gratings are thermally stable up to 700/spl deg/C and are suitable for an overgrowth process by metal organic vapour phase epitaxy.