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Measuring relative carrier concentrations at the nanoscale using scanning microwave impedance microscopy: The case of CdTe solar cells

机译:使用扫描微波阻抗显微镜在纳米级测量相对载流子浓度:CdTe太阳能电池的情况

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We present scanning microwave impedance microscopy as an analysis technique that can be used to map the relative carrier concentrations at the nanoscale in the semiconductors used for device applications. The specific application presented here is the analysis of PV-device grade CdTe, grown using rf-sputtering and close-spaced sublimation (CSS). We demonstrate a direct observation of carrier depletion along the grain boundaries in CdTe caused due to the CdCl2 annealing treatment, which is an important step in the device manufacture process.
机译:我们目前将扫描微波阻抗显微镜作为一种分析技术,可用于在用于设备应用的半导体中绘制纳米级的相对载流子浓度。本文介绍的特定应用是对使用rf溅射和近距离升华(CSS)生长的PV器件级CdTe的分析。我们展示了由于CdCl2退火处理而在CdTe中沿晶界引起的载流子耗尽的直接观察,这是器件制造过程中的重要步骤。

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