In this paper we present a multi-test platform to evaluate the barrier properties of encapsulation materials to be used to encapsulate electronic and implantable medical devices. This test platform leverages multiple material and process evaluation on one single substrate. Both cytotoxicity and cytoproliferation tests are possible, in combination with evaluation of barrier properties and aging monitoring structures. Process evaluation structures on conformality and maximum aspect ratios are included. The realization of the platform from concept to the fabrication process are given and the experimental details in accordance to ISO 10993 are described.
展开▼