Research on Feedforward Control in the linear motor direct drive XY two-dimensional platform

摘要

With the rapid development of the semiconductor industry, electronic packaging products have become increasingly demanding for equipment performance in the industry. High-precision motion platforms are widely used in these devices, so their accuracy of motion directly affects the performance of the device, and thus affects the quality of industrial products and production efficiency. The representative linear motor directly drives the XY two-dimensional platform system, and its rapid response, accurate positioning, and high reliability are widely used in semiconductor packaging equipment and other fields [1]. The permanent magnet linear motor drive method does not require an intermediate conversion link, and can directly provide a linear motion, thereby reducing the error introduced by the drive chain, and can provide a drive force without contact, thereby obtaining a higher operating speed and a higher repetitive positioning accuracy which makes the system more stable [2]. Therefore, a permanent magnet linear motor is widely used in an XY two-dimensional platform system. However, a feedback control of a permanent magnet linear motor may cause a problem of motor response delay, which affects the tracking accuracy of the motor [3]. Adding a feedforward controller to the feedback control can effectively solve this problem and improves the motion accuracy of the XY platform [4]. This paper introduces a linear motor direct drive XY two-dimensional platform system, which is characterized in that the XY platform controller incorporates a feed forward controller based on feedback control. Then introduces the hardware system of this controller, introduces its control object, and its control system. Comparing the performance of the feedforward controller with that of the controller without adding the feedforward controller, the main difference is the static error and settling time. The experimental results of the two control modes show that the latter has better real-time and fast response, and can improve the real-time and movement accuracy of the XY platform.