NANOMETRE-RESOLUTION KIKUCHI PATTERNS AND DARK-FIELD IMAGING FROM MATERIALS SCIENCE THIN SAMPLES WITH TRANSMISSION ELECTRON FORWARD SCATTER DIFFRACTION IN THE SCANNING ELECTRON MICROSCOPE

摘要

A charge-coupled device camera of an electron backscattered diffraction (EBSD) system in the cold-field emission scanning electron microscope (CFE-SEM) was positioned below a thin specimen and transmission Kikuchi patterns were collected. Contrary to EBSD, transmission electron forward scatter diffraction (t-EFSD) provides phase identification and orientation mapping at the nanoscale. This technique provides high quality crystallographic information with high resolution on thin specimens. First, the impact of tilt angle, working distance (DD) and detector distance on the Kikuchi pattern quality were investigated in a CFE-SEM. We demonstrated that t-EFSD is applicable for tilt angles ranging from -20° to -40° in a Hitachi SU-8000 CFE-SEM.