MEMS/NEMS Nano Technology

摘要

This book brings together over 153 peer-reviewed papers,grouped into 6 chapters:Micro-/Nano-Fabrication and Measurement Technologies,Micro-Sensors and Actuators,Microfluidic Devices and Systems,MEMS/NENS and Applications,Nano-Material Research / Nanotubes / Nanowire Devices,Micropower Technology,Theories in Micro-/Nano-Technologies.Most of the papers are authored by Chinese researchers,and the volume thus offers a good overview of the research on MEMS and nano-technology being conducted in China.The work will be of great interest to researchers,graduate students and engineers who are working in the fields of MEMS and nano-technology.