Electro-mechanic modeling of dual membrane mems Fabry Perot Optical Tunable Filter using composite beam approach

摘要

Mechanic composite beam approach has been used to model an electrostatic dual membrane Microelectromechanical System (MEMS) Fabry Perot Optical Tunable Filter (FPOTF). In this technique, a multi layer Si3N4/Si thin films membrane is modeled as one composite membrane in order to derive its electro-mechanic behavior. Analytical model shows a movement towards center of FP cavity for both top and bottom membrane. This theoretical modeling is crucial in helping designer to correctly choose the optimal parameter in terms of material properties and configuration for each internal parts of this device.