RESEARCH ON FABRICATION OF MICRO STRUCTURE USING EDM DEPOSITION IN GAS

摘要

A new micro EDM method is described. First, the selection principles of micro electrical discharge deposition (EDD) processing parameters are confirmed. With brass, steel and tungsten as electrode, a micro cylinder with 0.19mm in diameter and 7.35mm in height is formed on high-speed steel surface, and then is removed selectively by exchanging polarities. Then a HIT character type array is deposited with the continuous deposition strategy of single cylinder. The deposition against the gravity and in argon is also studied experimentally. In the end, measurements show that the deposited material has obvious delaminating structure, whose components depend on the tool electrode material.