首页> 外文会议>International symposium on Physical design >Multi-project reticle floorplanning and wafer dicing
【24h】

Multi-project reticle floorplanning and wafer dicing

机译:多项目掩模版地板平面和晶圆切割

获取原文

摘要

Multi-project Wafers (MPW) are an efficient way to share the rising costs of mask tooling between multiple prototype and low production volume designs. Packing the different die images on a multi-project reticle leads to new and highly challenging floorplanning formulations, characterized by unusual constraints and complex objective functions. In this paper we study multi-project reticle floorplanning and wafer dicing problems under the prevalent side-to-side wafer dicing technology. Our contributions include practical mathematical programming algorithms and efficient heuristics based on interval-graph coloring which find side-to-side wafer dicing plans with maximum yield for a fixed multi-project reticle floorplan and given per-die maximum dicing margins. We also give novel shelf packing and simulated annealing reticle floorplanning algorithms for maximizing wafer-dicing yield. Experimental results show that our algorithms improve wafer-dicing yield significantly compared to existing industry tools and academic min-area floorplanners.
机译:多项目晶片(MPW)是在多种原型和低产量设计之间共享掩模工具的上升成本的有效方法。将不同的模具图像包装在多个项目掩模版上,导致新的和高度挑战的地板平移配方,其特征在于不寻常的约束和复杂的客观功能。在本文中,我们在普遍的侧向晶片切割技术下研究了多项目的掩模版地板和晶片切割问题。我们的贡献包括基于间隔图着色的实际数学编程算法和高效启发式,该算法找到侧向晶片切割计划,该计划具有固定的多项目掩模罩平面图的最大收益率,并给定每次模具最大切割边距。我们还提供了一种新型货架包装和模拟退火掩模丝网平面算法,用于最大化晶片切割产量。实验结果表明,与现有行业工具和学术最小面积平面图相比,我们的算法提高了晶圆化产量。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号