Double-patterning lithography is required at 20 nm node for planar CMOS. At the 16 / 14 nm node, in order to deliver attractive amount of Performance-Power-Area enhancement, 3-D FinFETs are required. Close collaboration at design ecosystem among fabrication foundry, EDA vendors, IP vendors, packaging vendors, and design houses is crucial for successful migration to FinFET circuits. This paper describes key issues in enabling circuit design using FinFETs and how to address them effectively.
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