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Erosion plume characteristics determination in ablation of metallic copper, niobium, and tantalum targets

机译:蚀刻金属铜,铌和钽靶的侵蚀羽毛特性测定

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On irradiation of metallic targets from niobium and tantalum with excimer XeCl laser (308 nm) in vacuum the UV and visible spectra of erosion plume were obtained. The erosion plume after ablation of copper, niobium and tantalum targets was studied using Langmuir probe. The ion and electron probe currents were obtained in the range from 0.2 to 2.2 J/cm-2 of energy densities at the target with probe-to-target separations from 10 to 133 mm. Multimodal distributions of ions by scatter velocities have been revealed. The spatial and temporal dependencies of electron probe currents were obtained in real time. The electron temperature of different plume regions was determined from a series of I-U characteristics taken at different distances between probe and copper or tantalum target. It was established that the plume electron temperature is non-uniform and has a maximum value in front of the plume. The acceleration of tantalum ions on plume irradiation with cw CO_2 laser recorded. The increase in ions energy from 25 to 50 eV was observed. The emission optical spectra were used in studying the plume qualitative composition. The velocities of atom and ion scatter were measured by the time-of-flight method from the emission optical spectra.
机译:在真空中与准分子Xecl激光器(308nm)的铌和钽的金属靶辐射进行腐蚀羽流的UV和可见光光谱。使用Langmuir探针研究了消融铜,铌和钽靶后的侵蚀羽毛。离子和电子探针电流在靶标的能量密度的0.2至2.2J / cm-2的范围内,具有10至133mm的探针与目标分离。通过散射速度揭示了离子的多模式分布。电子探针电流的空间和时间依赖性实时获得。不同羽流区域的电子温度由在探针和铜或钽靶之间的不同距离处采取的一系列I-U特性确定。建立羽流电子温度是不均匀的,并且在羽流前的最大值。 CW CO_2激光记录CW CO_2激光器钽离子加速钽离子辐照。观察到离子能量的增加,从25至50eV中观察到。发射光谱用于研究羽流定性组合物。通过从发射光谱的飞行时间方法测量原子和离子散射的速度。

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