Novel optical probing system with submicron spatial resolution for internal diagnosis of VLSI circuits

摘要

In this paper, we introduce a novel optical probing system for the internal diagnosis of VLSI circuits. Based on an electro-optic sampling technique, this probing system achieved a sub-/spl mu/m spatial resolution by utilizing the scanning force microscopy technique. The optical sampling pulse width was 30 ps, and the minimum detectable voltage was as small as 10 mV. In an atmospheric environment this system can measure internal signal waveforms of VLSI circuits much faster than electron-beam testers.