Evaluation Feature of Nano Grain Growth of TiO_2 Thin Film via Sol-Gel Route

摘要

TiO_2 films were successfully coated via a spin coating sol-gel route, using tetrabutyl titanate as the main raw reagent. One batch of samples was sintered at different temperatures, ranges from 300 to 800 ℃, for 2 h, while other ones were treated at 700 ℃ for different soaking times (1-600 min). The phase compositions of the films were identified with X-ray diffraction (XRD). The microstructure of the coating were observed by a scanning electron microscope (SEM). Experimental results indicated that well-developed crystallinity and good morphology of TiO_2 could be synthesized above 500 ℃ for 2 h. The crystallinity and morphology of grains in films were affected by the reaction temperature and time. However, image analysis shows that sintering temperature had a great impact on the crystallinity and particles size of the samples above 700 ℃. Kinetic exponents of grain growth were also obtained with image processing software.