Applications of excimer lasers in microelectronics,

摘要

Abstract: Among the newly developed techniques for thin film processing and semiconductor device fabrication, the excimer laser is one of the most promising and powerful due to its usefulness for rapid thermal processing and surface microstructure modification. To date, its applications in microelectronics include deep UV lithography, metal deposition and reflow, process monitoring and diagnostics, laser repairing, and thin film processing including high temperature superconductor material synthesis and laser enhanced chemical vapor deposition (CVD). In this paper, the status of semiconductor device metallization using excimers laser will be reviewed, and recent development in texturization of polycrystalline silicon thin films, silicide formation, and maskless patterning using excimer lasers will be presented.!21