The mass transfer in Al film during local anodic oxidation investigation

摘要

The mechanical stresses in thin films arise on all technological operations of their handling, in particular, at electrochemical oxidizing of aluminium. In this case in aluminium film there are structural stresses called by change of specific volume as a result of aluminium structural transformations into anodic oxide arised. The mechanical stresses in thin films can be measured with the help of an optical interferometry, X-ray diffraction or laser scanning. However, these methods can be used for measuring mechanical stresses only in the field of elastic deformations. It is known, that the relative softness of aluminium easily gives in its plastic deformation. The Al film plastic deformation go with the mass transfer which is the result of it. The main role for a mass transfer is played by a mechanisms of slipping and creeping dislocation with partial stress relacsation. The plastic deformation in films of aluminium can be spotted on measuring by a X-ray method of allocation on width of a texture with axes Al and Al normal to substrate. Usage of X-ray method for measuring does not yield complete representation about the mass transfer as a result of plastic deformation in aluminium film. The main goal of the given paper was examination of mass transfer in aluminium film at the process of anodizing its local areas. The plastic deformation arises because of an edge effect of lateral anodizing of aluminium under a mask.