Fluid control devices

摘要

Within an integrated programme on microengineering, the GEC HirstnResearch Centre is developing design modelling, machining and bondingntechniques for miniature fluid devices. Such devices are also the focusnof a Brite EuRam project which covers a range of fabrication techniquesnand individual devices, with emphasis later in the project onninterfacing and integration of devices into a complete system. Thisnpaper concentrates on the development of fabrication techniques whichninvolve a combination of lithography and electroforming, using a thickndry film resist and ultraviolet exposure to provide a very much cheapernalternative to the widely publicised LIGA method. A number of devicenstructures are described