Resonant Characteristics of Birdbath Shell Resonator in n =3 Wine-Glass Mode

摘要

In this paper, we present the design, fabrication and resonance characteristic of an axisymmetric 3D birdbath shell resonator operating in the n=3 wine-glass mode. Long ring-down time constant of 93 seconds, high quality factor of 10 million at nearly 34 kHz frequency, and large effective mass of 12.34 mg is achieved in the n=3 mode. This mode of operation has the potential to give lower noise performance as compared to the n=2 mode for a shell with similar quality factor. The resonator presented in this research can lead to a high performing navigation-grade MEMS gyroscope.