Patterning and Annealing Effects of Aerosol Deposited Hygroscopic Films for Humidity Sensors

摘要

thin film has presented higher capacitive intensity as well as the improvement in dielectric performances. The dissimilar finger width inter-digital capacitors (IDCs) and a spiral structure have evaluated with different open area ratio (OAR). The obtained results clearly indicate that the fourth sensor design gives best results before annealing due to its structural property. Whereas, second sensor design gives best results after annealing process. The sensitivity of second sensor design enhanced from 15.83 to 1300 after annealing. Hysteresis loss result has also been used to verify the highly sensitive design. Through minimum hysteresis loss and high correlated absorption and desorption value indicates highly sensitive sensing design. The structural property of aerosol-deposited BaTiO