Focused ion beam shaped micro-cutting tools for fabricating curvilinear features

摘要

This work combines focused ion bearm (FIB) sputtering and ultraprecision machining as a first step in fabricating polymer, ceramic and metal alloy microcomponents. Focused ion sputtering is used to shape a variety of miniature cutting tools including microgrooving / threading tools. Tools are made of cobalt M42 high speed steel or C2 grade tungsten carbide, and have cutting widths between 10 and 30 mum. FIB sputtering is useful for shaping tools, because this numerically controlled technique repreoducibly affords sub-micron dimensional resolution, different tool geometries and sharp tool cutting edges. Micro-grooving/threading tools consist of nonplanar facets with well-defined lengths and relative angles. Facets provide back rake, side rake and clearance taper behind cutting edges. Selected results from ultraprecisison machining are also presented. This includes lathe machining of helical grooves in PMMA and Macor~TM cylindrical workpieces.