Ion-induced fabrication of high-quality diamond particles on various substrates

摘要

Abstract: Effect of carbon implantation prior to diamond growth on diamond nucleations has been investigated for various substrates such as Si, Cu, Ti, Ni and Fe. The nucleation density is increased by one order of magnitude for carbon- implanted Si substrate via microwave plasma CVD. The diamond particles grown show well-defined (100) and (111) facets without twins or secondary nucleations. An enhancement of diamond nucleations by two orders of magnitude for carbon-implanted Cu and Ti substrates has been observed via magnet-active plasma CVD. The implanted carbon atoms seem to act as nuclei for diamond growth.!23