Properties of optically smooth diamond thin films produced by ECR-PACVD

摘要

Abstract: Optically smooth diamond films were deposited on Al and Si substrates by the ECR-PACVD method. The films on Al were grown on relatively low temperatures and pressures from CH$-3$/OH/H$-2$/O and were found to have highly defective nanocrystalline structure. The films on c-Si were grown at higher temperatures and pressures from CH$-4$//H$-2$//O$-2$/ and were found to consist of highly oriented (100) faceted crystals. The optical constants of the diamond films on c-Si are similar to those of natural diamond.!13