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Synthesis technique of diamondlike carbon films by laser ablation ion source in atmosphere

机译:大气激光烧蚀离子源合成类金刚石碳膜的工艺

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Abstract: We have developed a technique of depositing a synthetic diamond-like carbon film on glass substrate in atmosphere at ambient temperature. By placing a glass substrate within the plume created by irradiating a carbon target with a Nd:YAG laser, we are able to deposit a diamond-like carbon film on the surface of the substrate. Using a highly purified graphite carbon target insures that only carbon ions are ejected and present in the plume. We will provide an analysis of the films by both vertical and diagonal irradiation by Raman spectroscopy and electron probe micro analysis.!6
机译:摘要:我们已经开发出一种在环境温度下在玻璃基板上沉积合成类金刚石碳膜的技术。通过将玻璃基板放置在通过Nd:YAG激光照射碳靶而产生的羽流中,我们能够在基板表面沉积类金刚石碳膜。使用高度纯化的石墨碳靶可确保仅碳离子被喷射并存在于羽流中。我们将通过拉曼光谱和电子探针显微分析,通过垂直和对角线照射对薄膜进行分析。!6

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