类金刚石碳薄膜对碳膜导电性能的影响

摘要

Carbon films were prepared by carbonization of polyimide films as the raw materials.Then diamond-like carbon (DLC) films were deposited on the carbon films, and the effects of preparation conditions on the electrical conductivity of carbon films were studied. The surface morphology and microstructure of the carbon films and DLC films were analyzed using a scanning electron microscope, and their crystal structure was studied by means of X-ray diffraction.Results showed that the resistivity of the DIC films initially decreased and then increased with increasing deposition time. The DLC film obtained at a deposition time of 3 h had the lowest resistivity of 5.66 × 10-5 Ω1·m.%以聚酰亚胺薄膜为原料,经炭化形成碳膜;进而在碳膜表面制备了类金刚石碳(DLC)薄膜,研究了制备条件对碳膜导电性能的影响.采用扫描电镜分析了薄膜的表面形貌和微观结构;采用X射线衍射仪分析了薄膜的晶体结构.结果表明,DLC薄膜的电阻率随着沉积时间的延长先减小后增加;当沉积时间达到3 h时,相应DLC薄膜的电阻率达到最小值5.66×10-5Ω·m.