Calibration procedure of extreme ultraviolet detectors

摘要

The paper presents a procedure and laboratory setup for calibration of extreme ultraviolet detectors. The procedure determinates a responsivity of a photodiode applied in the technology of EUV radiation. The main elements of the described system are a gas-puff laser plasma source, metrology chamber with an optical beam splitter and a model instrument. The applied measurement method is based on a comparison of the detected signals from the model instrument and the tested detector. The reduction of an error resulting from instabilities of the source radiation is ensured using a special construction of the optical beam splitter. Because of the cost and the metrology features, the presented setup is future alternative for small factories and laboratories producing EUV detectors. In the paper, analysis and preliminary research of the setup are described.