The influence of spatio-temporal variation of temperature distribution in a polymer solution on a flat substrate on formation of polymer film's thickness distribution during drying process - based on results of simulation of the modified model

摘要

We did many numerical simulation of the modified model of drying process for the flat polymer (resist) film fabrication taking effects of latent heat and heat conductivity into account and studied effects of introducing latent heat and heat conductivity to the model. From those we clarified dependence of distribution of resist molecules on a substrate on latent heat of solvent. Moreover, we clarified why above characteristic dependence of distribution of resist molecules on latent heat appeared.